Lithographic method for creating damascene metallization layers
Local interconnect
Local interconnect formed using silicon spacer
Local interconnect patterning and contact formation
Local interconnect structures and methods for making the same
Local interconnect structures for integrated circuits and...
Local interconnection method and structure for use in...
Local metallization and use thereof in semiconductor devices
Local multilayered metallization
Localized doping and/or alloying of metallization for...
Localized slots for stress relieve in copper
Locally folded split level bitline wiring
Lossless microstrip line in CMOS process
Low area metal contacts for photovoltaic devices
Low capacitance interconnection
Low capacitance wiring layout and method for making same
Low charge-up reactive ion metal etch process
Low cost chip size package and method of fabricating the same
Low cost DRAM metallization
Low cost method of fabrication of vertical interconnections...