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Methods for making a dielectric stack in an integrated circuit

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Methods for making and using halosilylgermanes

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Methods for manufacturing alignment layer, active device...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Methods for manufacturing high dielectric constant film

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Methods for manufacturing memory and logic devices using the...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Methods for planarization of non-planar surfaces in device...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Methods for preparing a semiconductor structure for use in...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Methods for preparing ruthenium oxide films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
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Methods for processing a coating film and for manufacturing...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
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Methods for processing a coating film and for manufacturing...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Methods for producing low stress porous and CDO low-K...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Methods for producing low stress porous low-k dielectric...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Methods for reducing a dielectric constant of a dielectric...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Methods for reducing the reactivity of a semiconductor...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Methods for the deposition of high-K films and high-K films...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Methods for the use of alkoxysilanol precursors for vapor...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Methods for treating pluralities of discrete semiconductor...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Methods for treating pluralities of discrete semiconductor...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Methods of adhesion promoter between low-K layer and...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Methods of depositing films on semiconductor wafers using partia

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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