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Annealing of high-k dielectric materials

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Anti-reflective coating forming composition containing...

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Anti-reflective coating used in the fabrication of...

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APCVD method of forming silicon oxide using an organic...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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APCVD method of forming silicon oxide using an organic...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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APCVD method of forming silicon oxide using an organic...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Aperture masks for circuit fabrication

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Apparatus and method for applying process solution

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Apparatus and method for deposition of thin films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Apparatus and method for forming an oxynitride insulating...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Apparatus and method for forming an oxynitride insulating...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Apparatus and method for forming low dielectric constant film

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Apparatus and method for forming thin film at low...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Apparatus and method for heat-treating semiconductor substrate

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Apparatus and method for improving AC coupling on circuit...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Apparatus and method for low pressure chemical vapor deposition

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
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Apparatus and method for manufacturing semiconductor device

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Apparatus and method for manufacturing semiconductors using...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Apparatus and method for oxidizing silicon substrates

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Apparatus and method for planarization of spin-on materials

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Utilizing reflow
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