Solution flow-in for uniform deposition of spin-on films
Solvent prewet and method and apparatus to dispense the...
Solvent prewet and method to dispense the solvent prewet
Solvent vapor infiltration of organic materials into...
Sonic immersion process system and methods
Source reagent compositions for CVD formation of gate...
Spacers with a graded dielectric constant for semiconductor...
Spatially programmable microelectronics process equipment...
Spin coating bowl
Spin coating spindle and chuck assembly
Spin-on adhesive for temporary wafer coating and mounting to...
Spin-on dielectric formation process for use in...
Spin-on glass composition and method of forming silicon...
Sputter-deposited rare earth element-doped silicon oxide...
Sputtered insulating layer for wordline stacks
Sputtered insulating layer for wordline stacks
Sputtered insulating layer for wordline stacks
Sputtering film forming method, sputtering film forming...
Stabilization of low-k carbon-based dielectrics
Stabilization of Si photoanodes in aqueous electrolytes...