Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate
2005-03-15
2005-03-15
Picard, Leo (Department: 2125)
Semiconductor device manufacturing: process
Coating of substrate containing semiconductor region or of...
Multiple layers
C438S758000, C427S078000, C427S124000, C427S585000, C205S149000, C205S157000, C205S176000
Reexamination Certificate
active
06867149
ABSTRACT:
The chemical composition of thin films is modulated during their growth. A computer code has been developed to design specific processes for producing a desired chemical composition for various deposition geometries. Good agreement between theoretical and experimental results was achieved.
REFERENCES:
patent: 4331702 (1982-05-01), Hieber et al.
patent: 6162488 (2000-12-01), Gevelber et al.
Bajt Sasa
Vernon Stephen P.
EUV Limited Liability Corporation
Kasenge Charles
Picard Leo
Thompson Alan H.
Wooldridge John P.
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