Semiconductor wafer with low-K dielectric layer and process...

Sequential deposition of tantalum nitride using a...

Sequential deposition/anneal film densification method

Sequential in-situ heating and deposition of halogen-doped...

SiCOH film preparation using precursors with built-in...

Silane treatment of low dielectric constant materials in...

Silica membranes and process of production thereof

Silica thin films produced by rapid surface catalyzed vapor...

Silicon carbide having low dielectric constant

Silicon germanium surface layer for high-k dielectric...

Silicon nitride deposition method

Silicon nitride deposition method

Silicon nitride deposition method for use in forming a memory ce

Silicon nitride film formation method

Silicon nitride film, and semiconductor device and method of...

Silicon nitride films

Silicon nitride from bis(tertiarybutylamino)silane

Silicon nitride furnace tube low temperature cycle purge for...

Silicon oxide based gate dielectric layer

Silicon oxide gap-filling process