Methods of reducing plasma-induced damage for advanced...

Methods of using atomic layer deposition to deposit a high...

Methylated oxide-type dielectric as a replacement for SiO2...

Micro pipe manufacturing method

Microstructure device including a compressively stressed...

Minimizing coating defects in low dielectric constant films

Mixed frequency high temperature nitride CVD process

MOCVD method of tantalum oxide film

Moisture repellant integrated circuit dielectric material combin

Monolithic three-dimensional structures

Monosilane or disilane derivatives and method for low...

MOS transistors with improved gate dielectrics

Multi-chamber deposition of silicon oxynitride film for...

Multi-layered structure forming method, method of...

Multi-level type nonvolatile semiconductor memory device

Multi-stage, low deposition rate PECVD oxide

Multi-step high density plasma (HDP) process to obtain...

Multifunctional reagents for the surface modification of...

Multilayer anti-reflective coating process for integrated...

Multilayer ONO structure