High-speed planarizing apparatus for chemical-mechanical...
Highly selective and complete interconnect metal line and...
IC mechanical planarization process incorporating two slurry com
IC mechanical planarization process incorporating two slurry com
III-V compound semiconductor substrate manufacturing method
ILD planarization method
In situ method for CMP endpoint detection
In-situ chemical-mechanical planarization pad metrology...
In-situ feedback system for localized CMP thickness control
In-situ fluid jet orifice
Increased polish removal rate of dielectric layers using...
Indirect endpoint detection by chemical reaction
Inexpensive process for producing a multiplicity of...
Innovative method to build a high precision analog capacitor...
Insitu oxidation for polishing non-oxide ceramics
Integrated assist features for epitaxial growth bulk/SOI...
Integrated circuit device isolation methods using high...
Integrated circuit isolation of functionally distinct RF...
Integrated circuit planarization method
Integrated circuit process monitoring and metrology system