Structure design and fabrication on photomask for contact...
Structure for a reflection lithography mask and method for...
Structure for pattern formation, method for pattern...
Structure of a lithography mask
Structure of a mask for use in a lithography process of a semico
Structure of a phase shifting mask and method of fabricating the
Structure of phase shifting mask
Structure of phase shifting mask and method of manufacturing the
Structure with a silicon body having through openings
Structured pigment coating and its preparation and use
Structures useful in electron beam lithography
Sub-micron device fabrication
Sub-micron device fabrication using multiple aperture filter
Sub-resolution assist features
Sub-resolution assist features for photolithography with...
Sub-resolution phase shift mask
Sub-resolution sized assist features
Sub-wavelength diffractive elements to reduce corner rounding
Subresolution grating for attenuated phase shifting mask fabrica
Subresolution grating for attenuated phase shifting mask fabrica