O-acyloxime photoinitiators
One step laser fabrication of polymer wave-guided structures...
One-step method for on-line lithographic pattern inspection
OPC based illumination optimization with mask error constraints
OPC method for generating corrected patterns for a...
OPC method to improve e-beam writing time
OPC-like repair method for attenuated phase shift masks
Optical assist feature for two-mask exposure lithography
Optical compensation devices, systems, and methods
Optical corrective techniques with reticle formation and reticle
Optical lithographical imaging system including optical transmis
Optical lithographical imaging system including optical transmis
Optical lithography beyond conventional resolution limits
Optical mask and method of correcting the same
Optical mask correction method
Optical mask using phase shift and method of producing the same
Optical proximity correction
Optical proximity correction (OPC) method for improving...
Optical proximity correction (OPC) technique to compensate...
Optical proximity correction common process window...