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O-acyloxime photoinitiators

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Screen other than for cathode-ray tube
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One step laser fabrication of polymer wave-guided structures...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Screen other than for cathode-ray tube
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One-step method for on-line lithographic pattern inspection

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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OPC based illumination optimization with mask error constraints

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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OPC method for generating corrected patterns for a...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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OPC method to improve e-beam writing time

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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OPC-like repair method for attenuated phase shift masks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Optical assist feature for two-mask exposure lithography

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Optical compensation devices, systems, and methods

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Optical corrective techniques with reticle formation and reticle

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Optical lithographical imaging system including optical transmis

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making
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Optical lithographical imaging system including optical transmis

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making
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Optical lithography beyond conventional resolution limits

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Optical mask and method of correcting the same

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Optical mask correction method

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Optical mask using phase shift and method of producing the same

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Optical proximity correction

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Optical proximity correction (OPC) method for improving...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Optical proximity correction (OPC) technique to compensate...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Optical proximity correction common process window...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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