Sub-wavelength diffractive elements to reduce corner rounding

Details Sub-wavelength diffractive elements to reduce corner rounding Sub-wavelength diffractive elements to reduce corner rounding

2005-09-30

2009-11-03

Rosasco, Stephen (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

Reexamination Certificate

active

07611806

ABSTRACT:
The present invention discloses a mask including: a first region near a corner of a feature, the first region including a first element, the first element being transparent to a light, the first element having a side that is smaller than a wavelength of said light; a second region near the corner of the feature, the second region including a second element, the second element being transparent to the light, the second element having a side that is smaller than the wavelength of the light; and a third region near the corner of the feature, the third region including a third element, the third element being opaque to the light, the third element having a side that is smaller than the wavelength of the light.

REFERENCES:
patent: 6165693 (2000-12-01), Lin et al.
patent: 7197722 (2007-03-01), Wong
patent: 7285781 (2007-10-01), Cao
patent: 2007/0094959 (2007-05-01), Hu

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