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Ultra-short channel NMOSFETS with self-aligned silicide contact

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Ultraviolet and vacuum ultraviolet transparent polymer...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Ultraviolet and vacuum ultraviolet transparent polymer...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Unsharp masking of diagnostic radiation intensifying screens

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Screen other than for cathode-ray tube
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Use of a planarizing layer to improve multilayer performance...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Use of attenuating phase-shifting mask for improved printability

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Use of attenuating phase-shifting mask for improved...

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Use of calcium fluoride substrate for lithography masks

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Use of intersecting subresolution features for microlithography

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Use of partially fluorinated polymers in applications...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Use of soft adhesive to attach pellicle to reticle

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Using (LaNiO.sub.3) .sub.X (TiO.sup.2) .sub.1-X and (LaNiO.sub.3

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Using (LaNiO.sub.3).sub.X (TiO.sub.2).sub.1-x oxide absorption c

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Using different transmittance with attenuate phase shift...

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Using double exposure effects during phase shifting to...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Using light-shading colored ink capable of changing from hydroph

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Screen other than for cathode-ray tube
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Using new pattern fracturing rules for optical proximity...

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Using perfluoropoly-ethers to form pellicles

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Using second exposure to assist a PSM exposure in printing a...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Using thin films as etch stop in EUV mask fabrication process

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