Hardmask/barrier layer for dry etching chrome films and...
Hierarchy and domain-balancing method and algorithm for...
High accuracy fabrication of X-ray masks with optical and E-beam
High energy laser mask and method of making same
High performance EUV mask
High power masks and methods for manufacturing same
High power phase masks for imaging systems
High power phase masks for imaging systems
High resolution lithography system for microelectronic fabricati
High resolution soft x-ray or ion beam lithographic mask
High resolution X-ray mask having high aspect ratio absorber pat
High-resolution, patterned-media master mask
High-transmission attenuating PSM
High-transmittance attenuated phase-shift mask blank
Highly-corrected mask
Highly-corrected mask
Hinged pellicles and methods of use
Hole forming by cross-shape image exposure
Hole printing by packing and unpacking using alternating...
Hologram element