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Calibration of optical line shortening measurements

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Carbonization process for an etch mask

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CD uniformity of chrome etch to photomask process

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Cell projection mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Characterization and synthesis of OPC structures by fourier...

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Charge effect and electrostatic damage prevention method on...

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Charged beam mask having strut wider than charged beam, with...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Charged particle beam exposure method and mask employed therefor

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Charged particle beam transfer mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Charged-beam exposure mask and charged-beam exposure method

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Charged-particle-beam microlithography masks and methods for...

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Charged-particle-beam microlithography methods and reticles for

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Charged-particle-beam pattern-transfer methods and apparatus...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Charged-particle-beam transfer masks and methods of making

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Chelation cleaning process for repairing photomasks

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Chemical trim process

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Chrome mask dry etching process to reduce loading effect and...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Chromeless alternating reticle for producing semiconductor...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Chromeless mask for contact holes

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Chromeless mask for contact holes

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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