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Tapered ion implantation with femtosecond laser ablation to...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Technique for fabricating phase shift masks using self-aligned s

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Technique for preparing a photo-mask for imaging three-dimension

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Technique of exposing a resist using electron beams having...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Techniques to characterize iso-dense effects for microdevice...

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Template mask lithography utilizing structured beam

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Test mask for determining alignment of an automatic IC mask test

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Test mask for optical and electron optical systems

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Test object for use in detecting aberrations of an optical...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Test photomask, flare evaluation method, and flare...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Thermal generation of mask pattern

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Thermal transfer printer for producing a photomask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Thermal transfer printing processes with electroerosion and mate

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Thermally-generated mask pattern

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Thin film mask for use in an x-ray lithographic process and its

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Thin film materials for the preparation of attenuating phase shi

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Thin film materials for the preparation of attenuating phase...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Thin resist with nitride hard mask for via etch application

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Thin tantalum silicon composite film formation and annealing...

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Three dimensional mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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