Self-aligned spatial frequency doubling
Self-segregating multilayer imaging stack with built-in...
Semiconductor device, method of manufacturing a...
Sensitive positive electron beam resists
Sensitizing bath for chalcogenide resists
Shadow mask and method for producing a shadow mask
Shape deposition manufacturing of microscopic ceramic and...
Shift multi-exposure method
Silicon-containing alcohols and polymers having...
Silicon-containing compositions for spin-on arc/hardmask...
Silicon-containing polymer and its use as a masking resin in a l
Silylation of epoxy-containing photoresist films
Single component developer for use with ghost exposure
Single resist layer lift-off process for forming patterned layer
Soft mold, method of manufacturing the same, and patterning...
Solid state extension method
Solvent mixtures for antireflective coating compositions for...
Source of photochemically generated acids from diazonaphthoquino
Spatially varied interfaces for composite materials
Stock developer solutions for photoresists and developer solutio