Sensitizing bath for chalcogenide resists

Details Sensitizing bath for chalcogenide resists Sensitizing bath for chalcogenide resists

1985-02-05

1985-10-29

Louie, Won H.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

430323, 430311, 430313, 430495, G03C 524

Patent

active

045500746

ABSTRACT:
The invention involves a new sensitizing bath for chalcogenide glass-based resists. The inventive bath is alkaline and contains a silver complex whose ligand includes hydrophobic and hydrophilic moieties. Upon immersing a chalcogenide glass in the bath, a silver composition-containing film is formed on the surface of the glass. This film is substantially free of pin holes and has a uniform thickness which is insensitive to immersion time and largely determined by the pH of the bath.

REFERENCES:
patent: 4276368 (1981-06-01), Heller et al.
patent: 4286045 (1981-08-01), Nahara et al.

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