Hardmask composition having antirelective properties and...
Hardmask/barrier layer for dry etching chrome films and...
Heat-resistant photoresist composition and negative-type pattern
Heat-resistant photoresist composition, photosensitive substrate
High aspect ratio metal microstructures and method for preparing
High aspect ratio microstructures and methods for manufacturing
High aspect ratio photolithographic method for high energy...
High conformality antireflective coating compositions
High contrast high thermal stability positive photoresists havin
High contrast low metal ion positive photoresist developing meth
High contrast optical marking method for polished surfaces
High energy beam-sensitive copolymer
High ortho-ortho bonded novolak binder resins and their use in a
High performance curable polymers and processes for the...
High pressure photoresist silylation process and apparatus
High resolution lithography method using hydrogen developing rea
High resolution lithography using protons or alpha particles
High resolution phase edge lithography without the need for a tr
High resolution recording medium and method for producing same
High silicon content monomers and polymers suitable for 193...