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Hardmask composition having antirelective properties and...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
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Hardmask/barrier layer for dry etching chrome films and...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
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Heat-resistant photoresist composition and negative-type pattern

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
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Heat-resistant photoresist composition, photosensitive substrate

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
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High aspect ratio metal microstructures and method for preparing

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
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High aspect ratio microstructures and methods for manufacturing

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
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High aspect ratio photolithographic method for high energy...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
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High conformality antireflective coating compositions

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High contrast high thermal stability positive photoresists havin

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High contrast low metal ion positive photoresist developing meth

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High contrast optical marking method for polished surfaces

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
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High energy beam-sensitive copolymer

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High ortho-ortho bonded novolak binder resins and their use in a

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
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High performance curable polymers and processes for the...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
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High pressure photoresist silylation process and apparatus

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High resolution lithography method using hydrogen developing rea

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High resolution lithography using protons or alpha particles

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
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High resolution phase edge lithography without the need for a tr

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High resolution recording medium and method for producing same

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High silicon content monomers and polymers suitable for 193...

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