(Meth)acrylate, polymer photoresist composition, and pattern...
(Meth)acrylates containing urethane groups
1Postitve-working imaging composition and element and method of
3-D photo-patterning of refractive index structures in...
A method of image-wise exposing and developing halogen-containin
Accelerated particle lithographic processing and articles so pro
Acetylenic diol ethylene oxide/propylene oxide adducts and...
Acetylenic diol surfactant solutions and methods of using same
Acid sensitive ARC and method of use
Activating catalytic solution for electroless plating and method
Active hardmask for lithographic patterning
Additive for photoresist composition for resist flow process
Adhesion promotion in photoresist lamination and processing
Adjusting successive steps for making carrier tape
Alignment mark on a semiconductor and a method of forming the sa
Alkaline developing composition and method of use to process lit
Amplification of resist structures of fluorinated resist...
Antihalation compositions
Antihalation compositions
Antireflective coating composition