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Immersion lithography process, and structure used for the...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
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Immersion photolithography with megasonic rinse

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Improving etch resistance of a casein-based photoresist

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Integrated circuit micro-fabrication using dry lithographic proc

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Interference colored filters

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Interlayer for laser ablative imaging

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Intermediate layer composition for three-layer resist...

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Ionization radiation imageable photopolymer compositions

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Isolation of novolak resin without high temperature distillation

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Lamination of photopolymerizable film onto a substrate employing

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Laser ablated feature formation method

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Laser exposure of photosensitive polyimide for pattern formation

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Laser marking method and apparatus

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Layer patterning using double exposure processes in a single...

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Lift-off technique for producing metal pattern using single phot

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Light-absorbing antireflective layers with improved...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
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Light-sensitive composition and process

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Light-sensitive material and image forming processes using the s

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Light-sensitive mixture containing an 0-naphthoquinonediazide-su

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Light-sensitive polymer, method for preparing the same and metho

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