Laser ablated feature formation method

Details Laser ablated feature formation method Laser ablated feature formation method

1998-11-20

2000-09-19

McPherson, John A.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

430396, 430945, 430320, 359201, 359203, 359209, 2191218, B23K 2600

Patent

active

061209767

ABSTRACT:
A method and apparatus for ablating features in a substrate, the apparatus includes a radiation source and first and second rotating transparent uniformly thick disks positioned between the radiation source and a substrate to be irradiated. The method comprises irradiating the substrate with radiation that has passed through the first and second rotating disks, wherein the first and second disks are independently rotating at different angular velocities to create a predetermined irradiation pattern on the substrate. The disks may have a relative acceleration. The method and apparatus may be used to ablate nozzles having longitudinal axes which are non-orthogonal with the surface of the substrate and which are not parallel to each other.

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"Diffractive microlenses replicated in fused silica for excimer laser-beam homogenizing", Nikolajeff, et al., Applied Optics, vol. 36, No. 32, pp. 8481-8489, Nov. 10, 1997.
U.S. application No. 09/196,692, Shoemaker et al.

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