Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate
2005-07-12
2005-07-12
Huff, Mark F. (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
C430S313000, C430S311000, C430S330000, C430S331000, C430S314000, C430S281100, C430S280100, C430S283100, C430S284100, C430S285100, C430S905000, C430S906000, C430S907000, C430S909000, C430S910000, C430S966000, C430S967000, C430S942000, C430S953000, C430S945000, C264S401000
Reexamination Certificate
active
06916598
ABSTRACT:
This invention discloses compositions that can be polymerized/crosslinked imagewise upon exposure to ionization radiation such as x-ray, electron beam, ion beam, and gamma-ray. This invention also discloses methods of use for these compositions for microfabrication of ceramics, for stereolithography, and for x-ray, e-beam, and ion-beam lithography which can be used for photoresists.
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E. I. du Pont de Nemours and Company
Huff Mark F.
Lee Sin J.
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