Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1994-06-06
1995-05-09
Bowers, Jr., Charles L.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
430165, 430192, 430193, 430302, G03F 7021, G03F 730
Patent
active
054138990
ABSTRACT:
A light-sensitive mixture which contains a resinous binder which is insoluble in water but soluble or at least swellable in aqueous-alkaline solutions, and an o-naphthoquinonediazide-sulfonic acid ester, the o-naphthoquinonediazide-sulfonic acid ester being of the formula I ##STR1## in which R is hydrogen or an alkyl or aryl radical and
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Bergmann Klaus
Buhr Gerhard
Elsaesser Andreas
Scheler Siegfried
Zahn Wolfgang
Bowers Jr. Charles L.
Chu John S.
Hoechst Aktiengesellschaft
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