Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate
2005-03-10
2009-12-15
Davis, Daborah Chacko (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
C430S007000, C359S891000, C349S108000
Reexamination Certificate
active
07632629
ABSTRACT:
A pattern structure of at least two different layer system elements disposed adjacent one beside the other upon a carrier substrate, at least one of said layer system elements comprises a layer of dielectric material, the layer of dielectric material residing upon a layer of a material that is resistant to activated oxygen or activated water and having a second surface facing toward the substrate. The dielectric layer of the one layer system element forms a disturbed region between the adjacent layer system elements, the dielectric layer having a thickness of d5and wherein the disturbed region has a width of at most 10*d5.
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Edlingger Johannes
Simotti Maria
Sperger Reinhard
Chacko Davis Daborah
Notaro & Michalos P.C.
Oberlikon Trading AG, Trubbach
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