4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens
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Apparatus for adjusting a focal position of an electron beam and

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Apparatus for blanking a charged particle beam

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Apparatus for chopping a charged particle beam

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Apparatus for controlling magnetic field intensity

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Apparatus for focus-deflecting a charged particle beam

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Apparatus for generating a plurality of beamlets

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Apparatus for generating a plurality of beamlets

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Apparatus for generating a plurality of beamlets

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Apparatus for generating a plurality of beamlets

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Apparatus for generating a plurality of beamlets

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Apparatus for generating a plurality of beamlets

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Apparatus for injecting plasma gas in atmosphere

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Apparatus for keying in electron beams

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Apparatus for magnetically scanning and/or switching a...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Apparatus for modulating a particle beam intensity

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Apparatus wherein ionizing radiation is generated

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Apparatus with permanent magnetic lenses

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Arrangement and process for adjusting imaging systems

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Arrangement for masked beam lithography by means of electrically

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Arrangement for shadow-casting lithography

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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