Apparatus for focus-deflecting a charged particle beam

Details Apparatus for focus-deflecting a charged particle beam Apparatus for focus-deflecting a charged particle beam

1980-04-17

1984-10-02

Dixon, Harold

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250311, 250396R, H01J 314, G21K 108

Patent

active

044750447

ABSTRACT:
The apparatus for focus-deflecting a charged particle beam includes two electron lenses for focusing the charged particle beam and a single deflector for deflecting the charged particle beam to a desired position, wherein one of the electron lenses on the object point side and the deflector are arranged so that their magnetic fields overlap each other, and the aberration generated by them offsets that generated by the other of the electron lenses.

REFERENCES:
patent: 3872305 (1975-03-01), Kaike
patent: 3924126 (1975-12-01), Anderson et al.
patent: 3930181 (1975-12-01), Pfeiffer
patent: 4110622 (1978-08-01), Trotel

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