Deflection arrangement for separating two particle beams

Deflection compensating device for converging lens

Deflection lens device for electron beam lithography

Deflection lens system for generating a beam of neutral particle

Deflection method and system for use in a charged particle...

Deflection structure for a corpuscular beam blanking system and

Deflection system

Deflection system for a particle beam device

Deflection system for charged-particle beam

Deflective focusing system for charged particle beam

Deflector of a micro-column electron beam apparatus and...

Deflector, method of manufacturing deflector, and charged...

Deflector, method of manufacturing deflector, and charged...

Deflector, method of manufacturing deflector, and charged...

Delta-phi microlens for low-energy particle beams

Device and method for energy and angle-resolved electron...

Device and method for selecting an emission area of an...

Device for correcting third-order spherical aberration in a...

Device for electrostatic deflection of a particle beam

Device for influencing an electron beam