Apparatus for generating a plurality of beamlets

Details Apparatus for generating a plurality of beamlets Apparatus for generating a plurality of beamlets

2008-04-29

2008-04-29

Berman, Jack I. (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S398000, C250S492200

Reexamination Certificate

active

11527206

ABSTRACT:
The invention relates to an apparatus for generating a plurality of charged particle beamlets, comprising a charged particle source for generating a diverging charged particle beam, a converging means for refracting said diverging charged particle beam and a lens array comprising a plurality of lenses, wherein said lens array is located between said charged particle source and said converging means.In this way, it is possible to reduce aberrations of the converging means.

REFERENCES:
patent: 4338548 (1982-07-01), Bono et al.
patent: 4342949 (1982-08-01), Harte et al.
patent: 4524278 (1985-06-01), Le Poole
patent: 7129502 (2006-10-01), Kruit

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