Apparatus for controlling magnetic field intensity

Details Apparatus for controlling magnetic field intensity Apparatus for controlling magnetic field intensity

1981-09-25

1983-11-22

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

328230, G21K 108, H01J 3700

Patent

active

044171455

ABSTRACT:
A control apparatus according to this invention is installed between an intensity specifying circuit and an excitation current source for a magnetic lens or deflecting coil. The intensity specifying circuit generates a target signal (B) corresponding to the desired magnetic flux density (B) in a magnetic lens or deflecting coil. The excitation current source outputs a current (I) which produces the desired flux density (B). Due to the effects of hysteresis the ferromagnetic yoke adjacent the lens or deflecting coil, the relationship between the target signal (B) and current (I) is nonlinear. The control apparatus has a memory in which data defining the hysteresis characteristics of the lens or coil being controlled has been stored. The control means saves the present intensity specifying signal (the old target signal) and the most recent reverse-value signal (the last target signal proceeded and followed by target signals, both of which are higher or both of which are lower than the reverse-value signal) and with the new target signal calculates the change in current (.DELTA.I) required to produce the desired flux density and commands the excitation current source to output the corresponding current. The effects due to hysteresis of the ferromagnetic yoke are dealt with by the control apparatus facilitating computer control of the electromagnetic lens or deflecting means.

REFERENCES:
patent: 3911321 (1975-10-01), Wordly

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