Apparatus for injecting plasma gas in atmosphere

Details Apparatus for injecting plasma gas in atmosphere Apparatus for injecting plasma gas in atmosphere

2007-03-27

2007-03-27

Vo, Tuyet Thi (Department: 2821)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S398000, C250S374000, C250S379000

Reexamination Certificate

active

10556226

ABSTRACT:
An apparatus for injecting plasma in the atmosphere is provided, including a plurality of dielectric panels (13a,13b,13c), and13d, which are disposed in parallel at predetermined intervals, a gas supply portion (14), to which the dielectric panels (13a,13b,13c, and13d) are fixed and which supplies a gas to spaces between the dielectric panels (13aand13b), between the dielectric panels (13band13c), and between the dielectric panels (13cand13d), power electrodes (15a,15b, and15c), which are linearly installed near the gas supply portion (14) and between the dielectric panels (13aand13b, between the dielectric panels13band13c, and between the dielectric panels13cand13d), respectively, ground electrodes (16a,16b,16c, and16d), which are formed in the ends of the dielectric panels (13a,13b,13c, and13d), respectively, and a high frequency generator (17), which applies high frequency power to the power electrodes (15a,15b, and15c) and the ground electrodes (16a,16b,16c, and16d).

REFERENCES:
patent: 4429612 (1984-02-01), Tidman et al.
patent: 6140773 (2000-10-01), Anders et al.
patent: 2005/0127844 (2005-06-01), Mashima et al.
patent: 2001-60200 (2001-07-01), None

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