Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2008-03-25
2008-03-25
Berman, Jack I. (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S398000, C250S492200
Reexamination Certificate
active
07348567
ABSTRACT:
The invention relates to an apparatus for generating a plurality of charged particle beamlets, comprising a charged particle source for generating a diverging charged particle beam, a converging means for refracting said diverging charged particle beam and a lens array comprising a plurality of lenses, wherein said lens array is located between said charged particle source and said converging means.In this way, it is possible to reduce aberrations of the converging means.
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Berman Jack I.
Blakely & Sokoloff, Taylor & Zafman
Mapper Lithography IP B.V.
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