Apparatus for chopping a charged particle beam

Details Apparatus for chopping a charged particle beam Apparatus for chopping a charged particle beam

1984-11-16

1986-12-02

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250398, H01J 314

Patent

active

046266909

ABSTRACT:
An apparatus for chopping a charged particle beam comprises: deflecting means for deflecting a charged particle beam by a high frequency voltage; deflecting means for deflecting the charged particle beam by a DC voltage or low frequency saw-tooth voltage in the same deflecting direction as the high frequency deflecting means does; and aperture means for taking out only a part of the charged particle beam deflected. The generation time point of the pulse beam which is generated at a high frequency is arbitrarily adjusted by the DC voltage or low frequency saw-tooth voltage.

REFERENCES:
patent: 4110623 (1978-08-01), Azam et al.
patent: 4151417 (1979-04-01), Takigawa
patent: 4169229 (1979-09-01), Feuerbaum
patent: 4439685 (1984-03-01), Plies
patent: 4445041 (1984-04-01), Kelly

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