Apparatus for generating a plurality of beamlets

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens

Reexamination Certificate

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C250S398000, C250S492200

Reexamination Certificate

active

07365338

ABSTRACT:
The invention relates to an apparatus for generating a plurality of charged particle beamlets, comprising a charged particle source for generating a diverging charged particle beam, a converging means for refracting said diverging charged particle beam and a lens array comprising a plurality of lenses, wherein said lens array is located between said charged particle source and said converging means.In this way, it is possible to reduce aberrations of the converging means.

REFERENCES:
patent: 4338548 (1982-07-01), Bono et al.
patent: 4342949 (1982-08-01), Harte et al.
patent: 4524278 (1985-06-01), Le Poole
patent: 7129502 (2006-10-01), Kruit

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