Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2008-04-29
2008-04-29
Berman, Jack I. (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S398000, C250S492200
Reexamination Certificate
active
07365338
ABSTRACT:
The invention relates to an apparatus for generating a plurality of charged particle beamlets, comprising a charged particle source for generating a diverging charged particle beam, a converging means for refracting said diverging charged particle beam and a lens array comprising a plurality of lenses, wherein said lens array is located between said charged particle source and said converging means.In this way, it is possible to reduce aberrations of the converging means.
REFERENCES:
patent: 4338548 (1982-07-01), Bono et al.
patent: 4342949 (1982-08-01), Harte et al.
patent: 4524278 (1985-06-01), Le Poole
patent: 7129502 (2006-10-01), Kruit
Berman Jack I.
Blakely & Sokoloff, Taylor & Zafman
Mapper Lithography IP B.V.
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