Apparatus for blanking a charged particle beam

Details Apparatus for blanking a charged particle beam Apparatus for blanking a charged particle beam

2005-05-13

2010-06-01

Souw, Bernard E (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S492200, C250S505100

Reexamination Certificate

active

07728308

ABSTRACT:
A beam blanking unit (1) comprises first and second blanking plates (2, 3) mounted to a support plate (15). A stopper (4) is mechanically and electrically connected to the first blanking plate (2).

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