Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1982-07-26
1984-12-04
Anderson, Bruce C.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
250292, 3133611, B01D 5944, H01J 3500
Patent
active
044866640
ABSTRACT:
An arrangement and a process for adjusting imaging systems for bundles of charged particles, or for adjusting spectrometers for bundles of charged particles, are indicated, in which arrangement and process electric and/or magnetic correcting elements are used, which possess, in every case, a large number of electrodes and/or current conductors, which are arranged, symmetrically or asymmetrically, around the optical axis of the particle bundle, these electrodes being at potentials such that the resulting potentials V (r, .PHI.) at an azimuth angle (.PHI.) to a cylindrical surface at a radius (r) around an optical axis (Z) can be represented as the sum of V.sub.1 and V.sub.2, or, as the case may be, these current conductors carrying currents such that the magnitudes of the resulting currents I (r, .PHI.) at the azimuth angle (.PHI.), as defined above, can be represented as the sum of I.sub.1 and I.sub.2. The expressions V.sub.1, V.sub.2 and I.sub.1, I.sub.2 can, in their turn, be represented as sums, their addends being, respectively, of the type V.sub.1 =V.sub.1k sink.PHI., V.sub.2 =V.sub.2k cosk.PHI., and I.sub.1 =I.sub.1k sink.PHI. and I.sub.2 =I.sub.2k cosk.PHI., where k=1, 2, . . . P, with P representing the order of the multipole. The potentials and/or the currents are utilized, in this manner, to obtain superpositions of electric and/or magnetic dipoles, quadrupoles, hexapoles, etc.
REFERENCES:
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patent: 4360760 (1982-11-01), Brodowski
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