Apparatus for generating a plurality of beamlets

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C250S492200, C250S310000

Reexamination Certificate

active

07569833

ABSTRACT:
The invention relates to an apparatus for generating a plurality of charged particle beamlets, comprising a charged particle source for generating a diverging charged particle beam, a converging means for refracting said diverging charged particle beam and a lens array comprising a plurality of lenses, wherein said lens array is located between said charged particle source and said converging means.In this way, it is possible to reduce aberrations of the converging means.

REFERENCES:
patent: 4243866 (1981-01-01), Pfeiffer et al.
patent: 4342949 (1982-08-01), Harte et al.
patent: 4524278 (1985-06-01), Le Poole
patent: 4543512 (1985-09-01), Nakasuji et al.
patent: 4544847 (1985-10-01), Taylor et al.
patent: 4985634 (1991-01-01), Stengl et al.
patent: 4996441 (1991-02-01), Lischke
patent: 5483074 (1996-01-01), True
patent: 6014200 (2000-01-01), Sogard et al.
patent: 6124599 (2000-09-01), Muraki
patent: 6768125 (2004-07-01), Platzgummer et al.
patent: 2002/0039829 (2002-04-01), Yasuda et al.
Roelofs B J GM et al., “Feasibility of Multi-Beam Electron Lithography”,Microelectric engineering, Elsevier Publishers BV, Amsterdam, NL, vol. 2, No. 4, Dec. 1984, pp. 259-279.
Ando M et al., “Experimental Study of Multiple Ion Beam Machine”, Microelectronic Engineering, Elsevier Publishers BV, Amsterdam,NL, vol. 11, No. 1, pp. 431-434.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Apparatus for generating a plurality of beamlets does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for generating a plurality of beamlets, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for generating a plurality of beamlets will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4099808

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.