Apparatus for generating a plurality of beamlets

Details Apparatus for generating a plurality of beamlets Apparatus for generating a plurality of beamlets

2006-10-10

2009-08-04

Berman, Jack I (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S492200, C250S310000

Reexamination Certificate

active

07569833

ABSTRACT:
The invention relates to an apparatus for generating a plurality of charged particle beamlets, comprising a charged particle source for generating a diverging charged particle beam, a converging means for refracting said diverging charged particle beam and a lens array comprising a plurality of lenses, wherein said lens array is located between said charged particle source and said converging means.In this way, it is possible to reduce aberrations of the converging means.

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