Apparatus for modulating a particle beam intensity

Details Apparatus for modulating a particle beam intensity Apparatus for modulating a particle beam intensity

1989-12-08

1992-04-21

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

359245, 359305, H01J 326

Patent

active

051071240

ABSTRACT:
An apparatus for pulsing an electron beam essentially includes two pulse generators driven by a synchronizing unit, an electronic time delay element for delaying a trigger signal generated by the synchronizing unit, and two blanking capacitors arranged between the electron source and a first condensor lens and an electron optical column of an electron beam metrological equipment. Signals of different frequencies are applied to the blanking capacitors so that one electron pulse reaches the module surface per period t of the signal being measured. The phase relationship of the electron pulses is shifted over a time range of interest with the assistance of a controllable time delay element.

REFERENCES:
patent: 4626690 (1986-12-01), Todokoro et al.
Feuerbaum et al., "Beam Chopper For Subnanosecond Pulses in Scanning Electron Microscopy" J. Phys. E: Sci. Instrum., vol. 11, (1978) pp. 529-532.
May et al., "Picosecond Photoelectron Scanning Electron Microscope for Noncontact Testing of Integrated Circuits", Appl. Phys. Lett., vol. 51, No. 2, (Jul. 13, 1987).
American Institute of Physics, Rev. Sci. Instrum. 56 (4), Apr. 1985, pp. 567-571.
American Institute of Physics, Rev. Sci. Instrum 49(9), Sep. 1978, pp. 1293-1299.
H. Sadorf et al. entitled "Plug-In Fast Electron Beam Chopping System", Rev. Sci. Instrum. 56 (4), Apr. 1985.
E. Wolfgang entitled "Electron Beam Testing" from Microelectronic Engineering, 4 (1986) pp. 77-106.
R. Schmidt et al., entitled "E-Beam Testing of High-Speed Electronic Devices", Microelectronic Engineering, 5 (1986) pp. 523-530.

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