Tri-deflection electron beam system

Tunable radiation source providing a VUV wavelength planar...

Twin-mask, and method and system for using same to pattern micro

Twisted-compensated low-energy electron microscope

Two-dimensional patterning method, electronic device using...

Ultra precise polishing method and ultra precise polishing...

Ultra precise polishing method and ultra precise polishing...

Ultraviolet irradiating apparatus

Ultraviolet light processor and method of exposing surfaces to u

Umbilical cord facilities connection for an ion beam implanter

Uniformity control multiple tilt axes, rotating wafer and...

Uniformity control using multiple fixed wafer orientations...

Unit for treatment of substrate with ultraviolet radiation

Unitary electromagnet for double deflection scanning of charged

Use of supercritical fluid to dry wafer and clean lens in...

Utilization of an ion gauge in the process chamber of a...

Utilizing an integrated plasmon detector to measure a metal...

Vacuum device for handling workpieces

Vacuum system with mist prevention apparatus for...

Variable rectangle-type electron beam exposure apparatus and...