Unitary electromagnet for double deflection scanning of charged

Details Unitary electromagnet for double deflection scanning of charged Unitary electromagnet for double deflection scanning of charged

1980-06-30

1983-01-04

Anderson, Bruce C.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250396ML, H01J 3700

Patent

active

043674119

ABSTRACT:
A unitary electromagnet having two gaps is provided for the double deflection scanning of a charged particle beam. The unitary electromagnet is configured to permit traverse by said beam through the gaps in a plane defined by the gaps. The depth of the gaps is large as compared to the length to accommodate the scan of the beam. The mode of scanning is determined by the waveform used to energize the windings of the electromagnet and includes axial sweep scanning, off center scanning and split scanning.

REFERENCES:
patent: 3021445 (1962-02-01), Wideroe
patent: 3671895 (1972-06-01), Aucouturier et al.
patent: 3778626 (1973-12-01), Robertson
patent: 4110625 (1978-08-01), Cairns et al.
patent: 4117339 (1978-09-01), Wolfe

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