Vacuum device for handling workpieces

Details Vacuum device for handling workpieces Vacuum device for handling workpieces

1988-12-21

1990-08-14

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

2504411, 414217, 414221, H01V 3718

Patent

active

049489798

ABSTRACT:
A vacuum device comprises a vacuum working chamber for performing a predetermined process to a material such as substrate and a vacuum prechamber for changing the material. Both the vacuum chambers are coupled by a coupling member so as to communicate the interiors of the respective chambers and the communcation is managed by valve means located for the coupling member. Both vacuum chambers may be constructed so as to be movable or pivotable horizontally with respect to each other. The coupling member may be constructed as an independent member which is inserted between both the vacuum chambers as occasion demands.

REFERENCES:
patent: 3761709 (1973-09-01), Hasegawa et al.
patent: 3874525 (1975-04-01), Hassan et al.
patent: 3958124 (1976-05-01), Koch et al.
patent: 4227080 (1980-10-01), Okura et al.
patent: 4749868 (1988-06-01), Hatanaka et al.
patent: 4763005 (1988-08-01), Schumer

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