Ultraviolet light processor and method of exposing surfaces to u

Details Ultraviolet light processor and method of exposing surfaces to u Ultraviolet light processor and method of exposing surfaces to u

1975-06-02

1977-03-01

Smith, Alfred E.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250504, H01J 3720

Patent

active

040103749

ABSTRACT:
Ultraviolet light processors which expose the central region of the surface of a workpiece to more ultraviolet light than the edges are provided with secondary sources of ultraviolet light which expose the edges to more ultraviolet light than the central region. The central region and the edges are therefore exposed to approximately equal total amounts of ultraviolet energy per unit area.

REFERENCES:
patent: 1948239 (1934-02-01), Redd
patent: 3028483 (1962-04-01), Simmon
patent: 3449561 (1969-06-01), Basil et al.
patent: 3790801 (1974-02-01), Coleman

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