Hollow-beam apertures for charged-particle-beam...

Hybrid focused-flood ion beam system and method

Hybrid magnetic/electrostatic deflector for ion implantation...

Hybrid moving stage and rastered electron beam lithography syste

Hybrid scanning system and methods for ion implantation

Hydrogen ion implanter using a broad beam source

IC modification with focused ion beam system

Illumination system for electron beam lithography tool

Illumination system for shaping extreme ultraviolet...

Illumination system having a nested collector for annular...

Illumination system particularly for microlithography

Illumination system particularly for microlithography

Illumination system with a plurality of light sources

Illumination system with a plurality of light sources

Illumination system with field mirrors for producing uniform...

Illumination system, lithographic apparatus, mirror, method...

Illumination system, particularly for EUV lithography

Illuminator for microlithographic integrated circuit manufacture

Image noise removing method in FIB/SEM complex apparatus

Image processing method, image processing apparatus and...