Image noise removing method in FIB/SEM complex apparatus

Details Image noise removing method in FIB/SEM complex apparatus Image noise removing method in FIB/SEM complex apparatus

2007-02-06

2007-02-06

Wells, Nikita (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492300, C250S492100

Reexamination Certificate

active

11059434

ABSTRACT:
In an image noise prevention method in a composite system of a scanning electron microscope (SEM) and a focused ion beam apparatus (FIB), noise generated during a blanking period of the FIB is prevented from entering an image generated by the SEM by adjustment of scanning cycles of the FIB and the SEM.

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patent: 2004/0129351 (2004-07-01), Iwasaki
patent: 09-274883 (1997-10-01), None
patent: 11-317434 (1999-11-01), None

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