Illumination system with a plurality of light sources

Details Illumination system with a plurality of light sources Illumination system with a plurality of light sources

2006-07-04

2006-07-04

Lee, John R. (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S50400H, C250S494100, C353S037000, C353S099000

Reexamination Certificate

active

07071476

ABSTRACT:
There is provided an illumination system for EUV-wavelengths. The illumination system includes a plurality of EUV-light sources and an optical unit combining the plurality of EUV-light sources.

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