Illuminator for microlithographic integrated circuit manufacture

Details Illuminator for microlithographic integrated circuit manufacture Illuminator for microlithographic integrated circuit manufacture

1991-12-20

1992-11-24

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

2504931, 250504R, H01K 126

Patent

active

051665301

ABSTRACT:
The illuminator apparatus disclosed herein provides illumination for the microlithographic manufacture of semiconductor integrated circuits. Degradation of the illuminator output by photopolymerization of volatile compounds associated with the resist coatings is inhibited by utilizing a composite filter at the cooling area inlet to the light source which includes a bed of activated carbon for removing volatile compounds which are photopolymerizable to substances which are absorbtive at the exposing wavelengths.

REFERENCES:
patent: 4591724 (1986-05-01), Fuse et al.
patent: 5097136 (1992-03-01), Meyer et al.
Rick Hamilton "Volatile Organic Compound Destruction Using Thermal Processing" Solid State Technology, Sep. 1991--pp. 51-53.

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