Electron-detector diode biassing scheme for improved writing by

Electron-optical system with variable-shaped beam for generating

Electronic beam drawing apparatus

Electronic optics device with variable illumination and aperture

Electrooptic system array, charged-particle beam exposure...

Electrostatic cassette

Electrostatic discharge depolarization using high density...

Electrostatic lens for ion beams

Electrostatic parallelizing lens for ion beams

Electrostatic reticle chucks, charged-particle-beam...

Electrostatic trap for particles entrained in an ion beam

Elliptical ion beam distribution method and apparatus

Emitter for electron-beam projection lithography system, and...

End station for a parallel beam ion implanter

Erosion mitigation for collector optics using electric and...

Error-corrected corpuscular beam lithography

Etching of nanoscale structures

Etching of nanoscale structures

Ethane implantation with a dilution gas

EUV illumination system