Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent
1982-01-05
1983-10-25
Smith, Alfred E.
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
2504421, 361234, H02N 1300, H01J 3730
Patent
active
044121334
ABSTRACT:
An electrostatic cassette assembly comprising, a cassette body having a central opening for receiving a wafer to be processed in a particle beam lithographic system, a charge plate with a top surface having a coating of dielectric (nonconductive) material or a plurality of nonconductive means, or both, on which the wafer is supported, means for forcing said charge plate and wafer into contact with stop means to hold the wafer rigidly in said cassette assembly, and means for applying a potential difference between the wafer and the charge plate to flatten said wafer by Coulombic force so that the wafer is held both mechanically and electrostatically in said cassette assembly. Means are also provided for insuring a good electrical contact with the wafer and for aligning the wafer in the cassette assembly.
REFERENCES:
patent: 3983401 (1976-09-01), Livesay
patent: 3993509 (1976-11-01), McGinty
Juras, Jr. et al., "Electrostatic Holding Fixture for Flatness of a Nonrigid Sheet in Vacuum, " IBM Technical Disclosure Bulletin, vol. 21, No. 11, Apr. 1979.
Eckes William A.
Rhoades Russell H.
Shepard Charles E.
Vorreiter John W.
Wiesner John C.
Dwyer J. R.
Giarratana S. A.
Grigsby T. N.
Murphy T. P.
Smith Alfred E.
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