Etching of nanoscale structures

Details Etching of nanoscale structures Etching of nanoscale structures

1989-12-22

1991-06-04

Anderson, Bruce C.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250423F, H01J 3730

Patent

active

050216724

ABSTRACT:
A process for etching with a scanning tunneling microscope using a two-dimensional metal chalcogenide as the substrate, is disclosed.

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