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Charged particle beam apparatus and method for operating the...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Charged particle beam apparatus and method of controlling same

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
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Charged particle beam apparatus and method of controlling...

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
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Charged particle beam apparatus and pattern measuring method

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Charged particle beam apparatus and sample manufacturing method

Radiant energy – Inspection of solids or liquids by charged particles
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Charged particle beam apparatus and specimen holder

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Charged particle beam apparatus for forming a specimen image

Radiant energy – Inspection of solids or liquids by charged particles
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Charged particle beam apparatus having anticontamination means

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent

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Charged particle beam apparatus having particular electrostatic

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Charged particle beam apparatus including means for maintaining

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent

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Charged particle beam apparatus, charged particle detection...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Charged particle beam column and method for directing a...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Charged particle beam column and method of its operation

Radiant energy – Inspection of solids or liquids by charged particles – Methods
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Charged particle beam control element, method of fabricating...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Charged particle beam control element, method of fabricating...

Radiant energy – Inspection of solids or liquids by charged particles – Methods
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Charged particle beam device

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent

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Charged particle beam device

Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate

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Charged particle beam device

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Charged particle beam device

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Charged particle beam device

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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