Charged particle beam apparatus for forming a specimen image

Details Charged particle beam apparatus for forming a specimen image Charged particle beam apparatus for forming a specimen image

2011-06-07

2011-06-07

Vanore, David A (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S492300

Reexamination Certificate

active

07956324

ABSTRACT:
The invention provides a charged particle beam apparatus capable of preventing image errors in a display image and capturing a clear display image. A display image displayed on a display unit has a rectangular shape having sides that are substantially parallel to coordinate axes of a rectangular coordinate system determined by wafer alignment. A charged particle beam is radiated onto an area including a display image in a direction that is not parallel to the coordinate axes of the reference rectangular coordinate system to scan the area. Then, among image information obtained by scanning, only information of a position within the display image is displayed on the image display unit. In this way, a clear display image without brightness variation is obtained.

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